Logan Technologies, L.P. is a seller and broker of new, pre-owned, used, excess, and surplus semiconductor fabrication equipment, electronic test equipment, and spare parts. We deal in equipment and spare  parts used in the fabrication, testing, and manufacturing of solar cells and semiconductors.

Semiconductor Equipment

Manufature Model Condition Price

LAM RESEARCH 9600SE
LAM 200 MM 9600 SE, CLASSIC SOFTWARE, 3 AE RF GENERATORS, 10 ...

USED

$95,000.00

GASONICS PEP IRIDIA 4800DL
CONTACT billyliles@aol.com

USED

$85,000.00

Edwards if30k
Edwards iF 30k vacuum and blower, Tested to 4.4x10-3 torr. billyliles@aol.com

Used/Tested

$20,000.00

TEMESCAL VES 2550 E-BEAM EVAPORATOR

USED

$18,500.00

MATRIX 105
MATRIX MODEL 105 PLASMA ASHER, CLEAN AND CONPLETE. billyliles@aol.com

USED

$17,500.00

SVG 8800 COAT TRACK
SVG 3 LINE 150 MM COAT TRACKCONTACT billyliles@aol.com

USED

$17,500.00

SVG 8800 DEVELOP TRACK
SVG 150 MM 2-LINE TRACK, S/N 99-18801, COMPLETE CONTACT billyliles@aol.com 

USED

$17,500.00

TEGAL 903E
150 MM, VERY CLEAN TOOL, INCLUDES ACG-10 RF GENERATOR, VT520, KEYBOARD, E2M40 ...

USED

$17,500.00

TEPLA AUTO LOAD 300
Tepla Auto Load 300 Plasma Processor, holds two boats of 4 to 6" ...

Operational

$12,500.00

AXCELIS 150 MM DISK
USED, SOLD AS iS. CONTACT: billyliles@aol.com, 

USED

$10,000.00

ULVAC PHOENIX ASHER STRIPPER
ULVAC 200MM RIE/MICROWAVE ASHER WORKING WHEN DEINSTALLED. CRATED AND READY FOR SHIPMENT. ...

USED

$9,500.00

Edwards IF 1800 Dry Pump
Edwards IF 1800 Dry pump stack, Tested good to 2.4x10-3 torr, Back ...

Used/Tested

$9,000.00

TEL TOKYO ELECTRON MARK 11 CLEAN TRACK
TEL MARK 11 150 MM CLEAN TRACK, billyliles@aol.com

USED

$7,500.00

KAIJO FB 118CH WIRE BONDER
KAIJO FB 118CH WIRE BONDER. S/N 6180. BILLYLILES@AOL.COM

USED

$7,500.00

RFPP RF10S
RFPP RF10S 1000 WATTS @ 13.56 MHZ, TESTED GOOD.  billyliles@aol.com

USED

$5,450.00

MOSAID MS 3490 MEMORY TESTER
MOSAID MS 3490 MEMORY TESTER, P/N 1001300-00 REV A, BILLYLILES@AOL.COM , 254-760-2424

USED

$4,975.00

Lam Research Alliance Poly Chamber
150 MM Lam Poly Etch Chamber, Removed from Alliance platform. billyliles@aol.com 

Used

$4,500.00

Lam Alliance Oxide Camber
Lot of 2 Lam Alliance 150 MM oxide chamber. 254-760-2424

used

$4,500.00

NUTEK DATACON PC BOARD HANDLER NTM1110LM
DATACON SEMICONDUCTOR MODEL NTM1110LM PC BOARD HANDLER, TWO IN STOCKBILLYLILES@AOL.COM

USED GOOD

$4,200.00

Lam 4500 to 4520 Manifold Kit
Lam 4500 to 4520 Manifold Upgrade kit. billyliles@aol.com

New

$4,000.00

ASTEX AX2050 MICROWAVE GENERATOR
2500 WATTS @ 2.45 GHZ, billyliles@aol.com

USED

$3,500.00

DPVEEN 1550 WIRE BONDER
DPVEEN MODEL 1550 ULTRASONIC THERMOCOMPRESSION MANUAL WIRE BONDER. BILLYLILES@AOL.COM

USED

$3,400.00

EBARA AC Remote / Lam
Ebara remote AC box for Lam Rainbow. Model 213635, billyliles@aol.com

Used

$2,850.00

Lam Remote AC Box, 685-017705-005
Lam Rainbow Remote AC Box.billyliles@aol.com

used/good

$2,800.00

RFPP LF-10 RF POWER SUPPLY
1000 WATTS 50-469 KHZ, CONTACT: billyliles@aol.com

USED

$2,750.00

Lam Pump Control Box
Pump control box for Lam tool.billyliles@aol.com

Used

$2,500.00

Neslab HX-900
Nesab HX-900 water recirculation system. billyliles@aol.com

used

$2,500.00

Drytek 150 MM 384T ESC Chamber
Drytek 384T 150MM ESC oxide etch chamber. Removed 384T tool. billyliles@aol.com

Used

$2,500.00

Drytek 384tLoadlock
Drytek 384t plasma etcher 150 mm. transfer loadlock. billyliles@aol.com

used

$2,000.00

Gasonics Remote AC Box L-3510
Remote AC Box for Gasonics L-3510

Good

$1,975.00

ENI OEM-12A
ENI OEM-12A-21041-5 1250 WATT, 13.56 MHZ RF GENERATOR, TESTED GOOD, BILLYLILES@AOL.COM

USED

$1,950.00

Marconi 2850S Digital Transmission Analyzer opt 5&6
Marconi 2850S Digital Transmission Analyzer, opt 5 & 6. billyliles@aol.com

used

$1,900.00

MUPAC / DRYTEK VME ENCLOSURE 5129HCH16BS-100
MUPAC ENCLOSURE FOR DRYTEK ASIQ. TESTED GOOD. BILLYLILES@AOL.COM

USED

$1,800.00

Marconi 2850S Digital Trans Analyzer
Marconi Digital Transmission Analyzer Model 2850S - opt 1 and 2S/N 243306/019 ...

used operational

$1,700.00

Wavetek Model 3600 D
Wavetek Cellular Test System Model 3600D CDMA Test system powers up and ...

used / operational

$1,500.00

Ebara A-30W
Ebara A-30W Dry pump. Two in stock. billyliles@aol.com 

used

$1,450.00

UNIVERSAL PLASTICS CHILLER / UP033-2500-DLD
CONTACT: BILLYLILES@AOL.COM

USED

$1,450.00

Noise/Com MP 2500 Multi Path Fading Emulator
Noise/Com Multi Path Fading Emulator Model 2500Powers up and seems to work ...

used / operational

$1,000.00

AMAT Applied Materials Custon Bell Jar Base Plate
Custom stainless steel bas plate. Designed to fit AMAT 8300 bell jar. ...

used

$1,000.00

Drytek RF Supply / 2000500
Drytek Model 2000500 1000 Watt 13.56 Mhz RF Power Supply. S/N 1071. ...

operational

$950.00

SMC THERMO-CON HEC 200 W-2-X5

USED

$900.00

AE ADVANCED ENERGY SLAVE GENERATOR 3152194-008V
AE ADVANCED ENERGY SLAVE GENERATOR, MODEL 3152194-008V. BILLYLILES@AOL.COM

USED

$900.00

NOvazonic SQ 10 Piraha Bath
Novazonic Quartz Piraha Bath, SQ-10 Rebuilt. No manuals. logansemi@aol.com  Several other sizes in ...

Rebuilt

$900.00

AE ADVANCED ENERGY PDP 2500
AE ADVANCED ENERGY PDP 2500 PULSED PLASMA RF GENERATOR M/N 6012-007 S/N ...

USED

$900.00

Novazonic SS-12 Stainless Hot Pot
Novazonic SS-12 Stainless steel Hot Pot. billyliles@aol.com

used

$900.00

RFPP LF-5 RF Generator
RFPP LF-5 RF Generator. 500 watts, 40 - 460 KHZ, Untested.billyliles@aol.com

Used

$850.00

ENI DCG-100 DC PLASMA GENERATOR
ENI DCG-100 POWER SUPPLY MODEL DCG2S-A12200010 Rev D, 254-760-2424

USED

$825.00

HEATWAVE LABS 101303-22B TEMPERATURE CONTROLLER
CONTACT: billyliles@aol.com

USED

$750.00

AE MCS MERCATOR SYSTEMS ATN 500M
AE MCS MERCATOR CONTROL SYSTEMS ATN-500M RF MATCHING SYSTEMS. BILLYLILES@AOL.COM

USED

$700.00

TEL TOKYO ELECTRON CT-11 320 WAFER INDEXER
REMOVED FROM TEL MARK 11 150 MM COAT TRACK

USED

$700.00

ENI ACG-5 RF GENERATOR
NICE WORKING ENI ACG-5XL, Low power. billyliles@aol.com

USED

$700.00

ASTECH automatic Matching Network / ATL-100R
ASTECH Model ATL-100RA Automatic Matching NetworkClean, but untestedbillyliles@aol.com   254-760-2424

Used

$600.00

MKS 651C THROTTLE VALVE CONTROLLER
MKS 651C THROTTLE VALVE CONTROLLER. BILLYLILES@AOL.COM

USED

$600.00

Scienscope XTX-5C Stereo Microscope
Scienscope Stereo Microscope with 2X / 4X and WF10X Eyepieces. Dual Illumination. ...

used

$500.00

VAT PM 5 / 641PM

USED

$450.00

ATN MICROWAVE NP5 WAFER PROBE TEST SET
ATN MICROWAVE NP5 WAFER PROBE TEST SET, OPT NP5 E/M. BILLYLILES@AOL.COM

USED

$400.00

JC SYSTEMS 520 CONTROLLER / SET POINT PROGRAMMER
MODEL 5200DP-180CT-RH-S 254-760-2424

USED

$300.00

Sierra Instruments 741-1 Flow Controller
Sierra Instruments Model 741-1, 100 SCFM Flow Controller. billyliles@aol.com

used

$300.00

MKS Signal Conditioner / 270C
MKS 270C - 4 Signal Conditioner, billyliles@aol.com

used

$275.00

SOLA EPC 150-60 Power Conditioner
SOLA EPC-150-01 500 VA power conditioner, 120 VAC, 6.2A @ 120 Hz. ...

used/operational

$250.00

MKS 270C Signal Conditioner
MKS 270C-4 Signal Conditioner, S/n 66813-3billyliles@aol.com

Used

$200.00

MKS 250B Controller
MKS 250B-1-D controller. Powers up, but is untested.billyliles@aol.com

used

$200.00

JC SYSTEMS CONTROLLER / SETPOINT PROGRAMMER 510
JC SYSTEMS MODEL 510 CONTROLLER / SETPOINT PROGRAMMER, 510DP-422-180CT-S, WE ALSO MODEL ...

USED / OPERATIONAL

$200.00

MKS 152C-R2 PRESSURE CONTROLLER
MKS 152C-R2 AUTOMATIC PRESSURE CONTROLLER. OPERATIONAL. BILLYLILES@AOL.COM

USED

$175.00