Lam ASIQ Etcher/Asher (back to listings)
Price:
$10,500.00
Condition:
Selling for parts
Year:
1996
Description:
S/N W-1102-700.021, 150 MM, Removed from Fab as working tool, but we've started parting it out. Original configuration was three metal etch chambers and one resist strip. Three AE 1250 watt RF supplies, 1 Magtnetron power supply, 1 electrode motor chassis, 1 transport motor chassis, 4 MKS Type 651 Pressure controllers, 3 Osaka turbo pumps with Model TD370/400 power supplies. Manuals included.