Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.

We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam ASIQ Metal Etcher/Asher cluster tool, and Lam 9500 Alliance chambers. 

Single Image Single Image Single Image Single Image

Lam ASIQ Etcher/Asher

Price:
$39,500.00

Condition:
Excellent

Year:
1996

Description:

S/N W-1102-700.021, 150 MM,  Removed from Fab as working tool. Three metal etch chambers and one resist strip. Three AE 1250 watt RF supplies, 1 Magtnetron power supply, 1 electrode motor chassis, 1 transport motor chassis, 4 MKS Type 651 Pressure controllers, 3 Osaka turbo pumps with Model TD370/400 power supplies. Manuals included.