Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.

We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam/Drytek ASIQ Metal Etcher/Asher cluster tool, Lam 2080 Chillers, March PX-1000 and Technics  PlanarEtch 11.

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ENI ACG-5 XL

Price:
$1,450.00

Condition:
Operational

Year:
1994

Description:

ENI ACG-5 XL RF 13.56Mhz 500 Watt "air cooled" RF Generator. S/N 5078, this generator was repaired and tested by ENI in April 2004 and never placed back into service. Repairs doc's are in the box. We verfied 500 watt operation into a dummy load.