Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.

We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam/Drytek ASIQ Metal Etcher Parts Tool,  Lam 2080 Chillers, March PX-1000, Lam Research 4528, M&W Dual Channel Chiller, AE PDW-2200, ENI- OEM 650A, ENI ACG-5,  and a large supply  of new and used Drytek spare parts.

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March PX-1000

Price:
$29,750.00

Condition:
Good/Operational

Year:
1999

Description:

OPERATIONAL. We checked it, both in the Manual and Auto mode.

S/N 9349. Downstream, RIE, or Isotropic plasma barrel asher/etcher system.  Holds up to 14 shelves. Includes ENI ACG-10B, 13.56 Mhz, 1000 Watt Generator. Two shelves. Two MFC's, Auto or manual RF tuning. Single Phase 220 VAC, 30 AMP.  

Includes Operation Manual.

Pump and table not included.