Logan Technologies, L.P. is a seller and broker of new, pre-owned, used, excess, and surplus semiconductor fabrication equipment, electronic test equipment, and spare parts. We deal in equipment and spare  parts used in the fabrication, testing, and manufacturing of solar cells and semiconductors.

Semiconductor Equipment

Manufature ↑ Model Condition Price

ADVANCED ENERGY AE MDX-L6 POWER SUPPLY
MODEL 2280-000-D, NEEDS REPAIR. billyliles@aol.com 

USED

$1,200.00

AE ADVANCED ENERGY SLAVE GENERATOR 3152194-008V
AE ADVANCED ENERGY SLAVE GENERATOR, MODEL 3152194-008V. BILLYLILES@AOL.COM

USED

$900.00

AE ADVANCED ENERGY PDP 2500
AE ADVANCED ENERGY PDP 2500 PULSED PLASMA RF GENERATOR M/N 6012-007 S/N ...

USED

$900.00

AE MCS MERCATOR SYSTEMS ATN 500M
AE MCS MERCATOR CONTROL SYSTEMS ATN-500M RF MATCHING SYSTEMS. BILLYLILES@AOL.COM

USED

$700.00

AMAT Applied Materials Custon Bell Jar Base Plate
Custom stainless steel bas plate. Designed to fit AMAT 8300 bell jar. ...

used

$1,000.00

ASTECH automatic Matching Network / ATL-100R
ASTECH Model ATL-100RA Automatic Matching NetworkClean, but untestedbillyliles@aol.com   254-760-2424

Used

$600.00

ASTEX AX2050 MICROWAVE GENERATOR
2500 WATTS @ 2.45 GHZ, billyliles@aol.com

USED

$2,500.00

ATN MICROWAVE NP5 WAFER PROBE TEST SET
ATN MICROWAVE NP5 WAFER PROBE TEST SET, OPT NP5 E/M. BILLYLILES@AOL.COM

USED

$400.00

AXCELIS GEMINI MICROWAVE ASHER
AXCELIS GEMINI 200 MM ASHER, 2 CHAMBERS, MODEL 202 MCU CHAMBERS. billyliles@aol.com

USED

$35,000.00

AXCELIS EATON 8250 LOAD STATION
EATON AXCELIS 150 MM LOAD STATION. CONTACT BILLYLILES@AOL.COM

USED

$25,000.00

BROOKS ROBOT, 1-5600-02
CONTACT BILLYLILES@AOL.COM

USED

$2,000.00

DPVEEN 1550 WIRE BONDER
DPVEEN MODEL 1550 ULTRASONIC THERMOCOMPRESSION MANUAL WIRE BONDER. BILLYLILES@AOL.COM

USED

$3,400.00

Drytek 150 MM 384T ESC Chamber
Drytek 384T 150MM ESC oxide etch chamber. Removed 384T tool. billyliles@aol.com

Used

$2,500.00

Drytek RF Supply / 2000500
Drytek Model 2000500 1000 Watt 13.56 Mhz RF Power Supply. S/N 1071. ...

operational

$950.00

Drytek 384tLoadlock
Drytek 384t plasma etcher 150 mm. transfer loadlock. billyliles@aol.com

used

$2,000.00

Ebara A-30W
Ebara A-30W Dry pump. Two in stock. billyliles@aol.com 

used

$1,450.00

Ebara A10S Dry Vacuum Pump
Contact: billyliles@aol.com

used

$2,200.00

EBARA AC Remote / Lam
Ebara remote AC box for Lam Rainbow. Model 213635, billyliles@aol.com

Used

$2,850.00

EDWARDS QDP-80 DRY PUMP
CONTACT BILLYLILES@AOL.COM

REBUILT

$2,500.00

EDWARDS 40/80 CHILLER
CONTACT BILLYLILES@AOL.COM, NEEDS REPAIR

USED

$2,000.00

EDWARDS IPX-500 SPI, DRY PUMP
REBUILT. CONTACT BILLYLILES@AOL.COM

REBUILT

$3,000.00

ENI OEM-12A
ENI OEM-12A-21041-5 1250 WATT, 13.56 MHZ RF GENERATOR, TESTED GOOD, BILLYLILES@AOL.COM

USED

$1,950.00

ENI MW-5DM6 RF MATCHING NETWORK
BILLYLILES@AOL.COM

USED

$1,475.00

ENI DCG-100 DC PLASMA GENERATOR
ENI DCG-100 POWER SUPPLY MODEL DCG2S-A12200010 Rev D, 254-760-2424

USED

$825.00

ENI PLASMALOC 2 RF GENERATOR
PL-2HF-11451-55, NOVELUS, CONTACT BILLYLILES@AOL.COM

USED

$2,000.00

Gasonics Remote AC Box L-3510
Remote AC Box for Gasonics L-3510

Good

$1,975.00

JC SYSTEMS 520 CONTROLLER / SET POINT PROGRAMMER
MODEL 5200DP-180CT-RH-S 254-760-2424

USED

$300.00

JC SYSTEMS CONTROLLER / SETPOINT PROGRAMMER 510
JC SYSTEMS MODEL 510 CONTROLLER / SETPOINT PROGRAMMER, 510DP-422-180CT-S, WE ALSO MODEL ...

USED / OPERATIONAL

$200.00

Jeol 7505 Scanning Electron Microscope
With Noran EDX. Contact billyliles@aol.com

used

$30,000.00

Lam Pump Control Box
Pump control box for Lam tool.billyliles@aol.com

Used

$2,500.00

Lam Remote AC Box, 685-017705-005
Lam Rainbow Remote AC Box.billyliles@aol.com

used/good

$2,800.00

Lam Alliance Oxide Camber
Lot of 2 Lam Alliance 150 MM oxide chamber. 254-760-2424

used

$4,500.00

Lam Research Alliance Poly Chamber
150 MM Lam Poly Etch Chamber, Removed from Alliance platform. billyliles@aol.com 

Used

$4,500.00

Marconi 2850S Digital Transmission Analyzer opt 5&6
Marconi 2850S Digital Transmission Analyzer, opt 5 & 6. billyliles@aol.com

used

$1,900.00

Marconi 2850S Digital Trans Analyzer
Marconi Digital Transmission Analyzer Model 2850S - opt 1 and 2S/N 243306/019 ...

used operational

$1,700.00

MKS 152C-R2 PRESSURE CONTROLLER
MKS 152C-R2 AUTOMATIC PRESSURE CONTROLLER. OPERATIONAL. BILLYLILES@AOL.COM

USED

$175.00

MKS 270C Signal Conditioner
MKS 270C-4 Signal Conditioner, S/n 66813-3billyliles@aol.com

Used

$200.00

MKS 250B Controller
MKS 250B-1-D controller. Powers up, but is untested.billyliles@aol.com

used

$200.00

MKS Signal Conditioner / 270C
MKS 270C - 4 Signal Conditioner, billyliles@aol.com

used

$275.00

MKS 651C THROTTLE VALVE CONTROLLER
MKS 651C THROTTLE VALVE CONTROLLER. BILLYLILES@AOL.COM

USED

$600.00

MUPAC / DRYTEK VME ENCLOSURE 5129HCH16BS-100
MUPAC ENCLOSURE FOR DRYTEK ASIQ. TESTED GOOD. BILLYLILES@AOL.COM

USED

$1,800.00

NESLAB HX-300 WATER CHILLER
CONTACT BILLYLILES@AOL.COM

USED

$3,000.00

NESLAB COOLFLOW SYSTEM 4 WATER CHILLER
CONTACT BILLYLILES@AOL.COM

USED

$2,500.00

Noise/Com MP 2500 Multi Path Fading Emulator
Noise/Com Multi Path Fading Emulator Model 2500Powers up and seems to work ...

used / operational

$1,000.00

NOvazonic SQ 10 Piraha Bath
Novazonic Quartz Piraha Bath, SQ-10 Rebuilt. No manuals. logansemi@aol.com  Several other sizes in ...

Rebuilt

$900.00

Novazonic SS-12 Stainless Hot Pot
Novazonic SS-12 Stainless steel Hot Pot. billyliles@aol.com

used

$900.00

RFPP LF-5 RF Generator
RFPP LF-5 RF Generator. 500 watts, 40 - 460 KHZ, Untested.billyliles@aol.com

Used

$850.00

Scienscope XTX-5C Stereo Microscope
Scienscope Stereo Microscope with 2X / 4X and WF10X Eyepieces. Dual Illumination. ...

used

$500.00

Sierra Instruments 741-1 Flow Controller
Sierra Instruments Model 741-1, 100 SCFM Flow Controller. billyliles@aol.com

used

$300.00

SMC INR-498-P031 HEAT EXCHANGER
CONTACT billyliles@aol.com  254-760-2424

NEW

$7,500.00

SMC THERMO-CON HEC 200 W-2-X5

USED

$900.00

SOLA EPC 150-60 Power Conditioner
SOLA EPC-150-01 500 VA power conditioner, 120 VAC, 6.2A @ 120 Hz. ...

used/operational

$250.00

TEGAL 903E CHUCK AND SHUTTLE ASSY
TEGAL 903E 150 MM CHUCK AND SHUTTLE ASSEMBLY. billyliles@aol.com

USED

$3,500.00

TEGAL 903E
150 MM, VERY CLEAN TOOL, INCLUDES ACG-10 RF GENERATOR, VT520, KEYBOARDCONTACT billyliles@aol.com

USED

$8,500.00

TEL TOKYO ELECTRON MARK 11 CLEAN TRACK
TEL MARK 11 150 MM CLEAN TRACK, billyliles@aol.com

USED

$7,500.00

TEL TOKYO ELECTRON CT-11 320 WAFER INDEXER
REMOVED FROM TEL MARK 11 150 MM COAT TRACK

USED

$700.00

TEMESCAL BDJ-1800 EVAPORATOR
CONTACT BILLYLILES@AOL.COM 

USED

$29,500.00

Trebor Quantum 144 DI Water Hrater
Contact billyliles@aol.com , 208 VAC

Used

$25,000.00

ULVAC PHOENIX ASHER STRIPPER
ULVAC 200MM RIE/MICROWAVE ASHER WORKING WHEN DEINSTALLED. CRATED AND READY FOR SHIPMENT. ...

USED

$8,500.00

UNIVERSAL PLASTICS CHILLER / UP033-2500-DLD
CONTACT: BILLYLILES@AOL.COM

USED

$1,450.00

VAT PM 5 / 641PM

USED

$450.00

Wavetek Model 3600 D
Wavetek Cellular Test System Model 3600D CDMA Test system powers up and ...

used / operational

$1,500.00