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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.
We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam/Drytek ASIQ Metal Etcher/Asher cluster tool, Lam 2080 Chillers, March PX-1000 and Technics PlanarEtch 11.
Manufacturer
|
Model
|
Condition
|
Price
|
|---|---|---|---|
|
CleanTech 2000S CleanTech 2000S glove washer. We have several in stock. ... |
good | $1,275.00 |
|
Noah Precision 2004 Chiller Model 2004, 208/20A/60Hz |
unk | $275.00 |
|
Lam Research 2080 TCU Lam Research 2080 TCU, Dual Channel Chiller. Part ... |
Used | $5,900.00 |
|
Tegal 400 Asher Tegal model 400 strip/asher/descum. 300 Watt, 13.56 Mhz. ... |
Operational | $2,450.00 |
|
LAM 4420 S/N 20166 200MM, Classic software, ENI 650 Watt ... |
Excellent | $69,500.00 |
|
LAM 4520 S/N 24232. 200mm,CE Marked, Wafer Clamping, Backside Helium, ... |
Excellent | $149,500.00 |
|
Lam A-4 Gas Box Lam Gas box used on A-4 Alliance Plateform. ... |
Used | $6,500.00 |
|
LAM AC Remote Box Remote box AC box for Lam Rainbow 4420 ... |
appears good | $2,450.00 |
|
ENI ACG-5 XL ENI ACG-5 XL RF 13.56Mhz 500 Watt "air ... |
Operational | $1,450.00 |
|
Lam Alliance 9500 Lam Alliance Model 9500. 150MM. It fits onto ... |
Used | $4,750.00 |
|
Asyst APL-2200 SMIF Loader Part # 9700-3520-02, Three in stock, 200MM Bolt ... |
Excellent | $1,850.00 |
|
Tegal Super 421 Asher/Etcher Operational Dual channel Barrel asher/etcher. Temperature control, Two ... |
Operational | $4,750.00 |
|
Lam ASIQ Etcher/Asher S/N W-1102-700.021, 150 MM, Removed from Fab as ... |
Excellent | $39,500.00 |
|
Lam/Drytek ASIQ Transfer Load lock Lam/ Drytek ASIQ 150MM Transfer Loadlock Chamber. |
used | $2,500.00 |
|
Lam/Drytek ASIQ/Quad Computer Lam/Drytek, ASIQ/Quad, Model 5129HCH16BS-100 Complete Computer |
Used | $2,750.00 |
|
Lam Automatch ASIQ automatch part # 60194-1, several in stock. |
good | $875.00 |
|
Branson/IPC 2000T Barrel Asher/Etcher Barrel Etcher/Asher 12" Quartz Chamber, 1000 Watt, 13.56MHz ... |
Appears good | $7,500.00 |
|
FTS Systems Chiller Recirc cooling system. |
unk | $400.00 |
|
M&W Dual Channel Cooling System M&W Dual Channel Flowrite Recirculating Cooling System. Used ... |
Looks Good | $3,750.00 |
|
Zevatech ESEC CT-2000 S/N 80018. Pick and place. Looks unused. However, ... |
appears good | $9,900.00 |
|
Lam M/W Power Supply with Chamber Lam Magnatron power supply, part # 853-080248-001 E-1, ... |
Never used | $2,775.00 |
|
ENI OEM 12 S/N 770, 1200 Watt @ 13.56Mhz. Part # ... |
Used/Unknow | $925.00 |
|
Leybold OF-1000 Leybold Model OF-1000 oil recirc system. Three in ... |
appears good | $375.00 |
|
Technics PlasmaEtch 11 Technics PlasmaEtch 11 Anisotropic Etcher with 30 KHZ ... |
Used/Operational | $7,750.00 |
|
Norcimbus Power Purge lV "Brand New" Norcimbus three bottle gas cabinet. Two ... |
New | $7,500.00 |
|
Edwards Pump/Enclosure Edwards pump enclosure for QDP/QMB series pumps. |
appears good | $900.00 |
|
March PX-1000 OPERATIONAL. We checked it, both in the Manual and Auto ... |
Good/Operational | $29,750.00 |
|
Gasonics Remote AC Box L-3510 Remote AC Box for Gasonics L-3510 |
Good | $975.00 |
|
PLASMOS SD-4000 Complete parts tool for only $2850. We also ... |
unk | $2,850.00 |
|
OSAKA Vacuum TG 373/TD370/400 Osaka Vacuum Turbo Pump Model TG 373 with ... |
Used | $975.00 |
|
OSAKA TH-542 Turbo pump, s/n H520-1068, Pump was rebuilt but ... |
Excellent | $975.00 |
|
Dainippion Screen (DNS) WS-620C SRD DNS WS-620 150 MM SRD. I think that ... |
Unused | $6,000.00 |
|
Blue M WSP-109B Dual Thermo Shock Oven, 75'C to 200'C. 208V/1Ph/60HZ. ... |
Used | $775.00 |