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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.
We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam/Drytek ASIQ Metal Etcher/Asher cluster tool, Lam 2080 Chillers, March PX-1000 and Technics PlanarEtch 11.
Manufacturer
|
Model
|
Condition
|
Price
|
|---|---|---|---|
|
Noah Precision 2004 Chiller Model 2004, 208/20A/60Hz |
unk | $275.00 |
|
Leybold OF-1000 Leybold Model OF-1000 oil recirc system. Three in ... |
appears good | $375.00 |
|
FTS Systems Chiller Recirc cooling system. |
unk | $400.00 |
|
Blue M WSP-109B Dual Thermo Shock Oven, 75'C to 200'C. 208V/1Ph/60HZ. ... |
Used | $775.00 |
|
Lam Automatch ASIQ automatch part # 60194-1, several in stock. |
good | $875.00 |
|
Edwards Pump/Enclosure Edwards pump enclosure for QDP/QMB series pumps. |
appears good | $900.00 |
|
ENI OEM 12 S/N 770, 1200 Watt @ 13.56Mhz. Part # ... |
Used/Unknow | $925.00 |
|
Gasonics Remote AC Box L-3510 Remote AC Box for Gasonics L-3510 |
Good | $975.00 |
|
OSAKA TH-542 Turbo pump, s/n H520-1068, Pump was rebuilt but ... |
Excellent | $975.00 |
|
OSAKA Vacuum TG 373/TD370/400 Osaka Vacuum Turbo Pump Model TG 373 with ... |
Used | $975.00 |
|
CleanTech 2000S CleanTech 2000S glove washer. We have several in stock. ... |
good | $1,275.00 |
|
ENI ACG-5 XL ENI ACG-5 XL RF 13.56Mhz 500 Watt "air ... |
Operational | $1,450.00 |
|
Asyst APL-2200 SMIF Loader Part # 9700-3520-02, Three in stock, 200MM Bolt ... |
Excellent | $1,850.00 |
|
LAM AC Remote Box Remote box AC box for Lam Rainbow 4420 ... |
appears good | $2,450.00 |
|
Tegal 400 Asher Tegal model 400 strip/asher/descum. 300 Watt, 13.56 Mhz. ... |
Operational | $2,450.00 |
|
Lam/Drytek ASIQ Transfer Load lock Lam/ Drytek ASIQ 150MM Transfer Loadlock Chamber. |
used | $2,500.00 |
|
Lam/Drytek ASIQ/Quad Computer Lam/Drytek, ASIQ/Quad, Model 5129HCH16BS-100 Complete Computer |
Used | $2,750.00 |
|
Lam M/W Power Supply with Chamber Lam Magnatron power supply, part # 853-080248-001 E-1, ... |
Never used | $2,775.00 |
|
PLASMOS SD-4000 Complete parts tool for only $2850. We also ... |
unk | $2,850.00 |
|
M&W Dual Channel Cooling System M&W Dual Channel Flowrite Recirculating Cooling System. Used ... |
Looks Good | $3,750.00 |
|
Tegal Super 421 Asher/Etcher Operational Dual channel Barrel asher/etcher. Temperature control, Two ... |
Operational | $4,750.00 |
|
Lam Alliance 9500 Lam Alliance Model 9500. 150MM. It fits onto ... |
Used | $4,750.00 |
|
Lam Research 2080 TCU Lam Research 2080 TCU, Dual Channel Chiller. Part ... |
Used | $5,900.00 |
|
Dainippion Screen (DNS) WS-620C SRD DNS WS-620 150 MM SRD. I think that ... |
Unused | $6,000.00 |
|
Lam A-4 Gas Box Lam Gas box used on A-4 Alliance Plateform. ... |
Used | $6,500.00 |
|
Branson/IPC 2000T Barrel Asher/Etcher Barrel Etcher/Asher 12" Quartz Chamber, 1000 Watt, 13.56MHz ... |
Appears good | $7,500.00 |
|
Norcimbus Power Purge lV "Brand New" Norcimbus three bottle gas cabinet. Two ... |
New | $7,500.00 |
|
Technics PlasmaEtch 11 Technics PlasmaEtch 11 Anisotropic Etcher with 30 KHZ ... |
Used/Operational | $7,750.00 |
|
Zevatech ESEC CT-2000 S/N 80018. Pick and place. Looks unused. However, ... |
appears good | $9,900.00 |
|
March PX-1000 OPERATIONAL. We checked it, both in the Manual and Auto ... |
Good/Operational | $29,750.00 |
|
Lam ASIQ Etcher/Asher S/N W-1102-700.021, 150 MM, Removed from Fab as ... |
Excellent | $39,500.00 |
|
LAM 4420 S/N 20166 200MM, Classic software, ENI 650 Watt ... |
Excellent | $69,500.00 |
|
LAM 4520 S/N 24232. 200mm,CE Marked, Wafer Clamping, Backside Helium, ... |
Excellent | $149,500.00 |