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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.
We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam/Drytek ASIQ Metal Etcher/Asher cluster tool, Lam 2080 Chillers, March PX-1000 and Technics PlanarEtch 11.
Manufacturer
|
Model
|
Condition
|
Price
|
|---|---|---|---|
|
LAM 4520 S/N 24232. 200mm,CE Marked, Wafer Clamping, Backside Helium, ... |
Excellent | $149,500.00 |
|
LAM 4420 S/N 20166 200MM, Classic software, ENI 650 Watt ... |
Excellent | $69,500.00 |
|
Lam ASIQ Etcher/Asher S/N W-1102-700.021, 150 MM, Removed from Fab as ... |
Excellent | $39,500.00 |
|
March PX-1000 OPERATIONAL. We checked it, both in the Manual and Auto ... |
Good/Operational | $29,750.00 |
|
Zevatech ESEC CT-2000 S/N 80018. Pick and place. Looks unused. However, ... |
appears good | $9,900.00 |
|
Technics PlasmaEtch 11 Technics PlasmaEtch 11 Anisotropic Etcher with 30 KHZ ... |
Used/Operational | $7,750.00 |
|
Branson/IPC 2000T Barrel Asher/Etcher Barrel Etcher/Asher 12" Quartz Chamber, 1000 Watt, 13.56MHz ... |
Appears good | $7,500.00 |
|
Norcimbus Power Purge lV "Brand New" Norcimbus three bottle gas cabinet. Two ... |
New | $7,500.00 |
|
Lam A-4 Gas Box Lam Gas box used on A-4 Alliance Plateform. ... |
Used | $6,500.00 |
|
Dainippion Screen (DNS) WS-620C SRD DNS WS-620 150 MM SRD. I think that ... |
Unused | $6,000.00 |
|
Lam Research 2080 TCU Lam Research 2080 TCU, Dual Channel Chiller. Part ... |
Used | $5,900.00 |
|
Tegal Super 421 Asher/Etcher Operational Dual channel Barrel asher/etcher. Temperature control, Two ... |
Operational | $4,750.00 |
|
Lam Alliance 9500 Lam Alliance Model 9500. 150MM. It fits onto ... |
Used | $4,750.00 |
|
M&W Dual Channel Cooling System M&W Dual Channel Flowrite Recirculating Cooling System. Used ... |
Looks Good | $3,750.00 |
|
PLASMOS SD-4000 Complete parts tool for only $2850. We also ... |
unk | $2,850.00 |
|
Lam M/W Power Supply with Chamber Lam Magnatron power supply, part # 853-080248-001 E-1, ... |
Never used | $2,775.00 |
|
Lam/Drytek ASIQ/Quad Computer Lam/Drytek, ASIQ/Quad, Model 5129HCH16BS-100 Complete Computer |
Used | $2,750.00 |
|
Lam/Drytek ASIQ Transfer Load lock Lam/ Drytek ASIQ 150MM Transfer Loadlock Chamber. |
used | $2,500.00 |
|
LAM AC Remote Box Remote box AC box for Lam Rainbow 4420 ... |
appears good | $2,450.00 |
|
Tegal 400 Asher Tegal model 400 strip/asher/descum. 300 Watt, 13.56 Mhz. ... |
Operational | $2,450.00 |
|
Asyst APL-2200 SMIF Loader Part # 9700-3520-02, Three in stock, 200MM Bolt ... |
Excellent | $1,850.00 |
|
ENI ACG-5 XL ENI ACG-5 XL RF 13.56Mhz 500 Watt "air ... |
Operational | $1,450.00 |
|
CleanTech 2000S CleanTech 2000S glove washer. We have several in stock. ... |
good | $1,275.00 |
|
Gasonics Remote AC Box L-3510 Remote AC Box for Gasonics L-3510 |
Good | $975.00 |
|
OSAKA TH-542 Turbo pump, s/n H520-1068, Pump was rebuilt but ... |
Excellent | $975.00 |
|
OSAKA Vacuum TG 373/TD370/400 Osaka Vacuum Turbo Pump Model TG 373 with ... |
Used | $975.00 |
|
ENI OEM 12 S/N 770, 1200 Watt @ 13.56Mhz. Part # ... |
Used/Unknow | $925.00 |
|
Edwards Pump/Enclosure Edwards pump enclosure for QDP/QMB series pumps. |
appears good | $900.00 |
|
Lam Automatch ASIQ automatch part # 60194-1, several in stock. |
good | $875.00 |
|
Blue M WSP-109B Dual Thermo Shock Oven, 75'C to 200'C. 208V/1Ph/60HZ. ... |
Used | $775.00 |
|
FTS Systems Chiller Recirc cooling system. |
unk | $400.00 |
|
Leybold OF-1000 Leybold Model OF-1000 oil recirc system. Three in ... |
appears good | $375.00 |
|
Noah Precision 2004 Chiller Model 2004, 208/20A/60Hz |
unk | $275.00 |