Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.

We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam/Drytek ASIQ Metal Etcher/Asher cluster tool, Lam 2080 Chillers, March PX-1000 and Technics  PlanarEtch 11.

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Lam 9500 Matching Network (lower)

Price:
$1,500.00

Quantity:
1

Condition:
Used

Part Number:
853-480133-001/853-440656-001

Year:
1997

Description:

Complete Lam Alliance 9500 lower RF Matching network and controller.

Parts were removed from a Lam Alliance 9500 Oxide chamber.

Parts were used to a match an AE 1250 RF supply.