Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.

We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam/Drytek ASIQ Metal Etcher Parts Tool,  Lam 2080 Chillers, March PX-1000, Lam Research 4528, M&W Dual Channel Chiller, AE PDW-2200, ENI- OEM 650A, ENI ACG-5,  and a large supply  of new and used Drytek spare parts.

Single Image

Lam Alliance A-4 Assembly

Price:
$1,000.00

Quantity:
1

Condition:
Used

Part Number:
853-491592-001-A-3117

Year:
1997

Description:

Removed from Lam Alliance A-4 chamber. Complete assembly # 853-491592-001-A-3117. Includes PCB 810-034886-002-A, PCB 810-17893-002, and PCB 810-017038-001