Translate to:
Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.
We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam/Drytek ASIQ Metal Etcher/Asher cluster tool, Lam 2080 Chillers, March PX-1000 and Technics PlanarEtch 11.
Manufacturer
|
Model
|
Condition
|
Price
|
|---|---|---|---|
|
Switching Systems International (SSI) 15 VDC / SQM-200 20-0028-152-7: Switching Systems International (SSI), ... |
Used | $250.00 |
|
Lam 5" Electrode 715-11673-005: 5" Lower electrode for ... |
New | $300.00 |
|
VAT 8" Gate Valve 64246-XE52-1108: Valve was removed form ... |
Used/Unknow | $950.00 |
|
Tegal 901e/903e Software 26-041-022: Software for Tegal 901e/903e. ... |
good | $1,750.00 |
|
Lam 9500 Matching Network (lower) 853-480133-001/853-440656-001: Complete Lam Alliance 9500 ... |
Used | $1,500.00 |
|
Lam 9500 Matching Network (upper) 853-250124-003/853-250118-001: Upper match box controller ... |
Used | $900.00 |
|
Lam Alliance A-4 Assembly 853-491592-001-A-3117: Removed from Lam Alliance ... |
Used | $1,000.00 |
|
Lam/Drytek/PMT ASIQ Gas Box 2004270R-6: Lam ASIQ Gas box. ... |
Used/Unknow | $500.00 |
|
Lam ASIQ Matching Network 60194-1: We several in stock. ... |
used | $900.00 |
|
MKS Baratron 120A-13991: 1 Torr, 1/2" VCR, ... |
used | $149.00 |
|
MKS Baratron 625A11TDE: 10 TORR, Lam part ... |
Used | $200.00 |
|
Lam/Drytek Ceramic Wafer Clamp 2301856: 150 MM Ceramic Wafer ... |
Cleaned | $175.00 |
|
Lam/Drytek Controller PCB 605-016005-001: Part came out of ... |
Used | $1,200.00 |
|
Gasonics CPU-Process, PWA 14909-01: Gasonics L series, Looks ... |
unk | $200.00 |
|
Gasonics DC Driver PC Board 13014-02 Rev C: Gasonics L series DC ... |
unk | $200.00 |
|
Gasonics Display Driver, PCB 16498-01 Rev E: Gasonics L series Display ... |
unk | $200.00 |
|
Lam/Drytek End Point Amplifier 023914: Lam/Drytek End Point Amplifier ... |
Used | $250.00 |
|
Lam End Point Detector 852-494005-001-B-3614: Lam optical end point ... |
Used | $500.00 |
|
Lam ESC Power Supply 853-250758-001-1-221: ESC power supply removed ... |
Used/Unknow | $500.00 |
|
Lam/Drytek Expansion PCB 605-06006-001: |
Used | $1,500.00 |
|
Lam/Drytek Gas Interface PCB 2800893 Rev 4: ASIQ Gas Interface PCB. |
Appears Unused | $300.00 |
|
VAT ISO Valve F12-71673-02: ISO NW 100. Valve ... |
Used | $300.00 |
|
ACEco Lam 490 6" Electrode ACEco DS33-341: 6" bottom electrode for ... |
New | $200.00 |
|
Lam Lam/ASIQ parts misc: We have 2 Lam ASIQ ... |
$15,000.00 | |
|
Lam Microwave Power Supply 853-080248-001 rev E-1: 1 new and 2 ... |
New/used | $1,275.00 |
|
MKS MKS-653B 653B-4-100-1: We have a MKS ... |
Used | $200.00 |
|
Lam/Drytek MVME-101 Stepper PCB 2800473: |
Used | $400.00 |
|
Lam PCB 810-370141-001 Rev B: |
Used | $500.00 |
|
Lam PCB 810-017388-003 Rev-1: |
Used | $300.00 |
|
Lam PCB ADIO 810-017031-04 rev A: We have several Lam ... |
Used | $550.00 |
|
Lam/Drytek RF Interface PCB 2800921: ASIQ RF Interface PCB |
New/used | $400.00 |
|
Lam RS 232 Interface PCB 2800878 Rev. 3: Lam ASIQ RS-232 Interface ... |
used | $175.00 |
|
Gasonics Teflon Ring 14382-01: Teflon Ring for Gasonics ... |
Good | $300.00 |
|
Lam/Drytek Transport I/O PCB 2800911 Rev 7: ASIQ Transport I/O PCB. |
Appears Unused | $400.00 |
|
Lam/Drytek Triode IO PCB 2800899 Rev 5: Part came out of ... |
Used | $500.00 |
|
Lam/Drytek Upper Electrode Diffuser 715-250599-001: Upper Electrode Difusser for ... |
Cleaned | $175.00 |
|
Lam/Drytek Upper Electrode GRD Grid 715-250899-001: Upper Electrode Ground Grid. ... |
Cleaned | $250.00 |
|
Lam/Drytek Video PCB VGME-1024: New VGME-1024 Vidio Card ... |
New | $250.00 |
|
Lam/Drytek Wafer Arm ASSY 853-080447-002: ASIQ or 384T Wafer ... |
Never used | $400.00 |