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Logan Technologies, L.P. is a seller and broker of preowned, used, excess, and surplus semiconductor fabrication equipment. We deal in equipment used in the fabrication and manufacturing of semiconductors.
We specialize in plasma etch, clean, ash, and strip equipment. New arrivals include: Tegal Super 421, Lam/Drytek ASIQ Metal Etcher/Asher cluster tool, Lam 2080 Chillers, March PX-1000 and Technics PlanarEtch 11.
Manufacturer
|
Model
|
Condition
|
Price
|
|---|---|---|---|
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Lam Lam/ASIQ parts misc: We have 2 Lam ASIQ ... |
$15,000.00 | |
|
Tegal 901e/903e Software 26-041-022: Software for Tegal 901e/903e. ... |
good | $1,750.00 |
|
Lam/Drytek Expansion PCB 605-06006-001: |
Used | $1,500.00 |
|
Lam 9500 Matching Network (lower) 853-480133-001/853-440656-001: Complete Lam Alliance 9500 ... |
Used | $1,500.00 |
|
Lam Microwave Power Supply 853-080248-001 rev E-1: 1 new and 2 ... |
New/used | $1,275.00 |
|
Lam/Drytek Controller PCB 605-016005-001: Part came out of ... |
Used | $1,200.00 |
|
Lam Alliance A-4 Assembly 853-491592-001-A-3117: Removed from Lam Alliance ... |
Used | $1,000.00 |
|
VAT 8" Gate Valve 64246-XE52-1108: Valve was removed form ... |
Used/Unknow | $950.00 |
|
Lam ASIQ Matching Network 60194-1: We several in stock. ... |
used | $900.00 |
|
Lam 9500 Matching Network (upper) 853-250124-003/853-250118-001: Upper match box controller ... |
Used | $900.00 |
|
Lam PCB ADIO 810-017031-04 rev A: We have several Lam ... |
Used | $550.00 |
|
Lam End Point Detector 852-494005-001-B-3614: Lam optical end point ... |
Used | $500.00 |
|
Lam PCB 810-370141-001 Rev B: |
Used | $500.00 |
|
Lam/Drytek Triode IO PCB 2800899 Rev 5: Part came out of ... |
Used | $500.00 |
|
Lam/Drytek/PMT ASIQ Gas Box 2004270R-6: Lam ASIQ Gas box. ... |
Used/Unknow | $500.00 |
|
Lam ESC Power Supply 853-250758-001-1-221: ESC power supply removed ... |
Used/Unknow | $500.00 |
|
Lam/Drytek Wafer Arm ASSY 853-080447-002: ASIQ or 384T Wafer ... |
Never used | $400.00 |
|
Lam/Drytek MVME-101 Stepper PCB 2800473: |
Used | $400.00 |
|
Lam/Drytek RF Interface PCB 2800921: ASIQ RF Interface PCB |
New/used | $400.00 |
|
Lam/Drytek Transport I/O PCB 2800911 Rev 7: ASIQ Transport I/O PCB. |
Appears Unused | $400.00 |
|
Gasonics Teflon Ring 14382-01: Teflon Ring for Gasonics ... |
Good | $300.00 |
|
Lam 5" Electrode 715-11673-005: 5" Lower electrode for ... |
New | $300.00 |
|
Lam PCB 810-017388-003 Rev-1: |
Used | $300.00 |
|
VAT ISO Valve F12-71673-02: ISO NW 100. Valve ... |
Used | $300.00 |
|
Lam/Drytek Gas Interface PCB 2800893 Rev 4: ASIQ Gas Interface PCB. |
Appears Unused | $300.00 |
|
Lam/Drytek Upper Electrode GRD Grid 715-250899-001: Upper Electrode Ground Grid. ... |
Cleaned | $250.00 |
|
Lam/Drytek Video PCB VGME-1024: New VGME-1024 Vidio Card ... |
New | $250.00 |
|
Lam/Drytek End Point Amplifier 023914: Lam/Drytek End Point Amplifier ... |
Used | $250.00 |
|
Switching Systems International (SSI) 15 VDC / SQM-200 20-0028-152-7: Switching Systems International (SSI), ... |
Used | $250.00 |
|
Gasonics DC Driver PC Board 13014-02 Rev C: Gasonics L series DC ... |
unk | $200.00 |
|
Gasonics Display Driver, PCB 16498-01 Rev E: Gasonics L series Display ... |
unk | $200.00 |
|
Gasonics CPU-Process, PWA 14909-01: Gasonics L series, Looks ... |
unk | $200.00 |
|
ACEco Lam 490 6" Electrode ACEco DS33-341: 6" bottom electrode for ... |
New | $200.00 |
|
MKS MKS-653B 653B-4-100-1: We have a MKS ... |
Used | $200.00 |
|
MKS Baratron 625A11TDE: 10 TORR, Lam part ... |
Used | $200.00 |
|
Lam/Drytek Upper Electrode Diffuser 715-250599-001: Upper Electrode Difusser for ... |
Cleaned | $175.00 |
|
Lam/Drytek Ceramic Wafer Clamp 2301856: 150 MM Ceramic Wafer ... |
Cleaned | $175.00 |
|
Lam RS 232 Interface PCB 2800878 Rev. 3: Lam ASIQ RS-232 Interface ... |
used | $175.00 |
|
MKS Baratron 120A-13991: 1 Torr, 1/2" VCR, ... |
used | $149.00 |